Event date:
Feb 17 2022 2:30 pm

MEMS Sensors

Dr. Syed Zeeshan Ali, Director of Technology at Flusso Ltd., a spin-off company from the University of Cambridge
SBASSE 10-304
Micro Electro Mechanical Systems (MEMS) technology allows the miniaturization of mechanical components and has resulted in development of several types of sensors and devices designed on a micro-chip. These devices have the advantages of low cost, low power consumption, improved reliability, and can allow use in portable applications where bulk devices may not be feasible. This talk gives a short overview of MEMS, and focuses on MEMS based flow sensors and gas sensors. Both the devices are based on similar micro-heater platforms – that can heat up to >200°C with power consumption as low as 15mW and less than 50ms heat up time. Principles of operation, device construction and results will be presented.

Dr. Syed Zeeshan Ali is currently Director of Technology at Flusso Ltd., a spin-off company from the University of Cambridge. He graduated from GIK Institute, Pakistan, in 2003 with a bachelors in electronic engineering. He finished his PhD in 2007 at the University of Cambridge, UK, focusing on MEMS based gas sensor and was then a research associate at the University of Cambridge. He joined Cambridge CMOS Sensors Ltd. in 2010 (which became part of AMS AG in 2016) where he worked on the development of gas sensors and infrared emitters & detectors, before joining Flusso in 2019 to work on MEMS based flow sensors. He is an inventor on 20 patents and patent applications , and an author or co-author of more than 80 publications in international journals and conference proceedings and 2 book chapters.

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